A. Feature of UHV All Metal Gate Valve
- Pressure range : UHV to 1,000 Torr
- Leak rate : < 1x10^-10 Torr L/s
- Bakeable : < 200℃ (Valve body)
< 80℃ (actuator & indicator)
- Flange type : CF-F 4.5inch
- Material : SUS304 (Body & bonnet)
SUS300 series (gate & etc.)
SUS series (bellows housing)
Al6061 (actuator housing)
- Bonnet seal : OFEC gasket
- Manually actuated gate valve are equipped with
a spindle handle with a magnetical position indicator.