Vacuum Solution No.1 BRAND

COMPONENT

UHV Vacuum Valve


20250820_104856.jpg
01. UHV All Metal Gate Valve

A. Feature of UHV All Metal Gate Valve
       - Pressure range : UHV to 1,000 Torr
       - Leak rate : <  1x10^-10 Torr L/s
       - Bakeable : <  200℃ (Valve body)
                            <  80℃ (actuator & indicator)
        - Flange type : CF-F 4.5inch
        - Material : SUS304 (Body & bonnet)
                           SUS300 series (gate & etc.)
                           SUS series (bellows housing)
                           Al6061 (actuator housing)
         - Bonnet seal : OFEC gasket
         - Manually actuated gate valve are equipped with
               a spindle handle with a magnetical position indicator.

 

 

 

 

 

 

 

 

 

 
1(0003).png
02. UHV All Metal Angle Valve 
      (Manual Type)

A. Features of UHV All Metal Angle Valve 
    (Manual Type)
     
      - Temperature operating range:
         Bakeable to: 400°C(open), 300°C(close)
      - Pressure Range: 1x10^-10mbar~1000mbar
      - All stainless steel construction
      - Flange type : CF-F 2.75inch
      - Bellows stem seal
      - Leak Rate: 5X10-10 mbar.L/s
      - Life cycle (used for gasket sealing):
        300 times in mounting vertical/horizontal direction.
      - Orientation: Any position

 

 

 

 

 

 

 

 

 
2.png
03. UHV All Metal Angle Valve 
      (Torque wrench Type)

A. Features of UHV All Metal Angle Valve 
    (Torque wrench Type)
     
   - Baking Temperature : ≤300°C (in open and closed position)
      - Pressure Range: XHV to atmosphere
      - Flange type : CF-F 2.75inch
      - Bellows stem seal
      - Leak Rate : body/seat ≤1x10^-10mbar.L/s
      - Actuator : Hexagonal SW15
      - Orientation: Any position